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| No. | Article |
|---|---|
| 1 |
Proximity-controlled silicon carbide etching in inductively coupled plasma Kim B, Kim S, Ann SC, Lee BT Thin Solid Films, 434(1-2), 276, 2003 |
| No. | Article |
|---|---|
| 1 |
Proximity-controlled silicon carbide etching in inductively coupled plasma Kim B, Kim S, Ann SC, Lee BT Thin Solid Films, 434(1-2), 276, 2003 |