검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Secondary ion mass spectrometry characterization of the diffusion properties of 17 elements implanted into silicon Francois-St-Cyr H, Anoshkina E, Stevie F, Chow L, Richardson K, Zhou D Journal of Vacuum Science & Technology B, 19(5), 1769, 2001 |