검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Novel simple and complementary metal-oxide-semiconductor-compatible membrane release design and process for thermal sensors Leclerc S, Antaki R, Currie JF Journal of Vacuum Science & Technology A, 16(2), 876, 1998 |
| No. | Article |
|---|---|
| 1 |
Novel simple and complementary metal-oxide-semiconductor-compatible membrane release design and process for thermal sensors Leclerc S, Antaki R, Currie JF Journal of Vacuum Science & Technology A, 16(2), 876, 1998 |