검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Control of plasma process instabilities during thin silicon film deposition Hrunski D, Grahlert W, Beese H, Kilper T, Gordijn A, Appenzeller W Thin Solid Films, 517(14), 4188, 2009 |
| 2 |
The role of plasma induced substrate heating during high rate deposition of microcrystalline silicon solar cells van den Donker MN, Schmitz R, Appenzeller W, Rech B, Kessels WMM, van de Sanden MCM Thin Solid Films, 511, 562, 2006 |
| 3 |
Microcrystalline silicon for large area thin film solar cells Rech B, Roschek T, Repmann T, Muller J, Schmitz R, Appenzeller W Thin Solid Films, 427(1-2), 157, 2003 |