화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Influence of deposition pressure and power on characteristics of RF-Sputtered Mo films and investigation of sodium diffusion in the films
Akcay N, Sonmez NA, Zaretskaya EP, Ozcelik S
Current Applied Physics, 18(5), 491, 2018
2 Effect of Ar bubbling during plasma electrolytic oxidation of AZ31B magnesium alloy in silicate electrolyte
Lee J, Kim Y, Chung W
Applied Surface Science, 259, 454, 2012
3 High density plasma reactive ion etching of CoFeB magnetic thin films using a CH4/Ar plasma
Kim EH, Lee TY, Min BC, Chung CW
Thin Solid Films, 521, 216, 2012
4 Inductively coupled plasma reactive ion etching of IrMn magnetic thin films using a CH4/O-2/Ar gas
Lee TY, Kim EH, Chung CW
Thin Solid Films, 521, 229, 2012
5 Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching
Kathalingam A, Kim MR, Chae YS, Sudhakar S, Mahalingam T, Rhee JK
Applied Surface Science, 257(9), 3850, 2011
6 Investigation on etch characteristics of MgO thin films using a HBr/Ar plasma
Kim EH, Bin Xiao Y, Kong SM, Chung CW
Thin Solid Films, 519(20), 6820, 2011
7 Etch characteristics of FePt magnetic thin films using inductively coupled plasma reactive ion etching
Kim EH, Bin Xiao Y, Kong SM, Chung CW
Thin Solid Films, 519(23), 8223, 2011
8 Evaluation of thermoporometry for characterization of mesoporous materials
Yamamoto T, Endo A, Inagi Y, Ohmori T, Nakaiwa M
Journal of Colloid and Interface Science, 284(2), 614, 2005