검색결과 : 2건
No. | Article |
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1 |
Thin film deposition using a plasma source with a hot refractory anode vacuum arc Beilis II, Koulik Y, Boxman RL, Arbilly D Journal of Materials Science, 45(23), 6325, 2010 |
2 |
Amorphous Si Thin-Films Prepared by Vacuum Arc Deposition Arbilly D, Boxman RL, Goldsmith S, Rothwarf A, Kaplan L Thin Solid Films, 253(1-2), 62, 1994 |