화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrast in surface chemistry
van Dorp DH, Arnauts S, Laitinen M, Sajavaara T, Meersschaut J, Conard T, Kelly JJ
Applied Surface Science, 465, 596, 2019
2 Quantitative analysis of trace metals in silicon nitride films by a vapor phase decomposition/solution collection approach
Vereecke G, Schaekers M, Verstraete K, Arnauts S, Heyns MM, Plante W
Journal of the Electrochemical Society, 147(4), 1499, 2000
3 A wet chemical method for the determination of thickness of SiO2 layers below the nanometer level
De Smedt F, Stevens G, De Gendt S, Cornelissen I, Arnauts S, Meuris M, Heyns MM, Vinckier C
Journal of the Electrochemical Society, 146(5), 1873, 1999