검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Effect of substrate-enhanced and inhibited growth on atomic layer deposition and properties of aluminum-titanium oxide films Arroval T, Aarik L, Rammula R, Kruusla V, Aarik J Thin Solid Films, 600, 119, 2016 |
| 2 |
Plasmon resonance effect caused by gold nanoparticles formed on titanium oxide films Tamm A, Acik IO, Arroval T, Kasikov A, Seemen H, Marandi M, Krunks M, Mere A, Kukli K, Aarik J Thin Solid Films, 616, 449, 2016 |
| 3 |
Growth of TixAl1-xOy films by atomic layer deposition using successive supply of metal precursors Arroval T, Aarik L, Rammula R, Aarik J Thin Solid Films, 591, 276, 2015 |
| 4 |
Effect of oxygen on active Al concentration in ZnO: Al thin films made by PLD Kodu M, Arroval T, Avarmaa T, Jaaniso R, Kink I, Leinberg S, Savi K, Timusk M Applied Surface Science, 320, 756, 2014 |
| 5 |
Atomic layer deposition of high-quality Al2O3 and Al-doped TiO2 thin films from hydrogen-free precursors Aarik L, Arroval T, Rammula R, Mandar H, Sammelselg V, Hudec B, Husekova K, Frohlich K, Aarik J Thin Solid Films, 565, 19, 2014 |
| 6 |
Atomic layer deposition of rutile-phase TiO2 on RuO2 from TiCl4 and O-3: Growth of high-permittivity dielectrics with low leakage current Aarik J, Arroval T, Aarik L, Rammula R, Kasikov A, Mandar H, Hudec B, Husekova K, Frohlich K Journal of Crystal Growth, 382, 61, 2013 |
| 7 |
Atomic layer deposition of TiO2 from TiCl4 and O-3 Aarik L, Arroval T, Rammula R, Mandar H, Sammelselg V, Aarik J Thin Solid Films, 542, 100, 2013 |
| 8 |
Atomic layer deposition of ferromagnetic iron oxide films on three-dimensional substrates with tin oxide nanoparticles Tamm A, Dimri MC, Kozlova J, Aidla A, Tatte T, Arroval T, Maeorg U, Mandar H, Stern R, Kukli K Journal of Crystal Growth, 343(1), 21, 2012 |
| 9 |
Atomic layer deposition of Ru films from bis(2,5-dimethylpyrrolyl)ruthenium and oxygen Kukli K, Aarik J, Aidla A, Jogi I, Arroval T, Lu J, Sajavaara T, Laitinen M, Kiisler AA, Ritala M, Leskela M, Peck J, Natwora J, Geary J, Spohn R, Meiere S, Thompson DM Thin Solid Films, 520(7), 2756, 2012 |