검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Nitrogen effect on grown-in defects in Czochralski silicon crystals Umeno S, Ono T, Tanaka T, Asayama E, Nishikawa H, Hourai M, Katahama H, Sano M Journal of Crystal Growth, 236(1-3), 46, 2002 |
| 2 |
Effect of heavy boron doping on oxygen precipitation in Czochralski silicon substrates of epitaxial wafers Sueoka K, Akatsuka M, Yonemura M, Ono T, Asayama E, Katahama H Journal of the Electrochemical Society, 147(2), 756, 2000 |
| 3 |
Effect of heavy boron doping on oxide precipitate growth in Czochralski silicon Ono T, Asayama E, Horie H, Hourai M, Sueoka K, Tsuya H, Rozgonyi GA Journal of the Electrochemical Society, 146(6), 2239, 1999 |
| 4 |
Oxide precipitate-induced dislocation generation in heavily boron-doped Czochralski silicon Ono T, Romanowski A, Asayama E, Horie H, Sueoka K, Tsuya H, Rozgonyi GA Journal of the Electrochemical Society, 146(9), 3461, 1999 |