검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition and characterization of amorphous aluminum nitride thin films for a gate insulator Oikawa H, Akiyama R, Kanazawa K, Kuroda S, Harayama I, Nagashima K, Sekiba D, Ashizawa Y, Tsukamoto A, Nakagawa K, Ota N Thin Solid Films, 574, 110, 2015 |