화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 QuaSiC Smart-Cut (R) substrates for SiC high power devices
Letertre F, Jalaguier E, Di Cioccio L, Templier F, Bluet JM, Banc C, Matko I, Chenevier B, Bano E, Guillot G, Billon T, Aspar B, Madar R, Ghyselen B
Materials Science Forum, 389-3, 151, 2002
2 Nanometric patterning with ultrathin twist bonded silicon wafers
Fournel F, Moriceau H, Magnea N, Eymery J, Buttard D, Rouviere JL, Rousseau K, Aspar B
Thin Solid Films, 380(1-2), 10, 2000
3 Phase stepping microscopy for layer thickness measurement in silicon-on-insulator structures
Martin E, Sanz LF, Jimenez J, Perez-Rodriguez A, Morante JR, Aspar B, Margail J
Thin Solid Films, 311(1-2), 225, 1997
4 Silicon-on-Insulator Obtained by High-Dose Oxygen Implantation, Microstructure, and Formation Mechanism
Stoemenos J, Garcia A, Aspar B, Margail J
Journal of the Electrochemical Society, 142(4), 1248, 1995