검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Etch mechanisms of low dielectric constant polymers in high density plasmas: Impact of charging effects on profile distortion during the etching process Fuard D, Joubert O, Vallier L, Assous M, Berruyer P, Blanc R Journal of Vacuum Science & Technology B, 19(6), 2223, 2001 |
| 2 |
Suppression of the base-collector leakage current in integrated Si/SiGe heterojunction bipolar transistors Assous M, de Berranger E, Regolini JL, Mouis M, Hernandez C Journal of Vacuum Science & Technology B, 16(3), 1740, 1998 |