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| No. | Article |
|---|---|
| 1 |
Effect of sidewall passivation in BCl3/N-2 inductively coupled plasma etching of two-dimensional GaAs photonic crystals Atlasov KA, Gallo P, Rudra A, Dwir B, Kapon E Journal of Vacuum Science & Technology B, 27(5), L21, 2009 |