검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Al-Si-V and Al-Si-V-Pd Films as Alternatives for Al-Si-Cu Interconnect - Microstructure and Its Impact on Reliability Dirks AG, Augur RA, Deveirman AE Thin Solid Films, 246(1-2), 164, 1994 |
| No. | Article |
|---|---|
| 1 |
Al-Si-V and Al-Si-V-Pd Films as Alternatives for Al-Si-Cu Interconnect - Microstructure and Its Impact on Reliability Dirks AG, Augur RA, Deveirman AE Thin Solid Films, 246(1-2), 164, 1994 |