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| No. | Article |
|---|---|
| 1 |
Anisotropic and smooth inductively coupled plasma etching of III-V laser waveguides using HBr-O-2 chemistry Bouchoule S, Azouigui S, Guilet S, Patriarche G, Largeau L, Martinez A, Le Gratiet L, Lemaitre A, Lelarge F Journal of the Electrochemical Society, 155(10), H778, 2008 |