검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of reduction in etch rate of isolated holes in SiOCH Momonoi Y, Yonekura K, Izawa M Thin Solid Films, 516(11), 3564, 2008 |
| 2 |
Comparative studies of physical and chemical properties of plasma-treated CVD low k SiOCH dielectrics Tsang CF, Su YJ, Bliznetsov VN Thin Solid Films, 462-63, 269, 2004 |