검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction Klaus JW, Ferro SJ, George SM Thin Solid Films, 360(1-2), 145, 2000 |
| 2 |
Effect of water dose on the atomic layer deposition rate of oxide thin films Matero R, Rahtu A, Ritala M, Leskela M, Sajavaara T Thin Solid Films, 368(1), 1, 2000 |
| 3 |
Initial stage of the catalyzed growth of SiO2 films on Si(001): An ab initio study Okamoto Y Journal of Physical Chemistry B, 103(50), 11074, 1999 |