검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Quantitative determination of dielectric thin-film properties on product wafers using infrared reflection-absorption spectroscopy Niemczyk TM, Zhang LZ, Haaland DM, Radigan KJ Journal of Vacuum Science & Technology A, 16(6), 3490, 1998 |
| 2 |
A Vibrational Study of Ethanol Adsorption on Si(100) Eng J, Raghavachari K, Struck LM, Chabal YJ, Bent BE, Flynn GW, Christman SB, Chaban EE, Williams GP, Radermacher K, Manti S Journal of Chemical Physics, 106(23), 9889, 1997 |
| 3 |
A Comparative-Study of Spin-on and Chemical-Vapor-Deposited Teflon Amorphous Fluoropolymer Thin-Films Sharangpani R, Singh R Journal of the Electrochemical Society, 144(8), 2924, 1997 |
| 4 |
Infrared-Absorption Spectroscopy for Monitoring Condensable Gases in Chemical-Vapor-Deposition Applications Oneill JA, Passow ML, Cotler TJ Journal of Vacuum Science & Technology A, 12(3), 839, 1994 |
| 5 |
Comparison of Boranol and Silanol Reactivities in Boron-Doped SiO2 Chemical-Vapor-Deposition from Trimethyl Borate and Tetraethyl Orthosilicate Bartram ME, Moffat HK Journal of Vacuum Science & Technology A, 12(4), 1027, 1994 |
| 6 |
Chemical-Vapor-Deposition of TiSi2 Using SiH4 and TiCl4 Mendicino MA, Southwell RP, Seebauer EG Thin Solid Films, 253(1-2), 473, 1994 |