검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Oxygen vacancies in SiO2, layers an Si produced at high temperature Afanas'ev VV, Stesmans A, Revesz AG, Hughes HL Journal of the Electrochemical Society, 145(9), 3157, 1998 |
| 2 |
The Effects of Fluorine Ion-Implantation on the Formation of Simox Structure Zhu SY, Lin CL Thin Solid Films, 298(1-2), 147, 1997 |
| 3 |
Silicon-on-Insulator Obtained by High-Dose Oxygen Implantation, Microstructure, and Formation Mechanism Stoemenos J, Garcia A, Aspar B, Margail J Journal of the Electrochemical Society, 142(4), 1248, 1995 |