화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Capacitance-voltage study of single-crystalline Si dots on ultrathin buried SiO2 formed by nanometer-scale local oxidation
Ishikawa Y, Kosugi M, Kumezawa M, Tsuchiya T, Tabe M
Thin Solid Films, 369(1-2), 69, 2000
2 Deuterium sintering of silicon-on-insulator structures: D diffusion and replacement reactions at the SiO2/Si interface
Wallace RM, Chen PJ, Archer LB, Anthony JM
Journal of Vacuum Science & Technology B, 17(5), 2153, 1999
3 Paramagnetic Point-Defects in Amorphous Thin-Films of SiO2 and Si3N4 - Updates and Additions
Poindexter EH, Warren WL
Journal of the Electrochemical Society, 142(7), 2508, 1995