검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Nitrogen influence on dangling-bond configuration in silicon-rich SiOx : N,H thin films Pivac B, Rakvin B, Borghesi A, Sassella A, Bacchetta M, Zanotti L Journal of Vacuum Science & Technology B, 17(1), 44, 1999 |
| 2 |
Infrared Study of Si-Rich Silicon-Oxide Films Deposited by Plasma-Enhanced Chemical-Vapor-Deposition Sassella A, Borghesi A, Corni F, Monelli A, Ottaviani G, Tonini R, Pivac B, Bacchetta M, Zanotti L Journal of Vacuum Science & Technology A, 15(2), 377, 1997 |
| 3 |
An Increased Effective Depth of Focus at Contact Mask for Nonvolatile Memories Using an Enhanced Planarization Scheme Cork C, Bacchetta M Journal of Vacuum Science & Technology B, 12(6), 3773, 1994 |