검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Atomic force microscopy investigation of a-C : H films prepared by plasma enhanced chemical vapor deposition for inertial confinement fusion experiments Dumay B, Finot E, Theobald M, Legaie O, Baclet P, Durand J, Goudonnet JP Journal of Vacuum Science & Technology A, 20(2), 366, 2002 |
| 2 |
Doped CHx microshells prepared by radio frequency plasma enhanced chemical vapor deposition for inertial confinement fusion experiments Theobald M, Baclet P, Legaie O, Durand J Journal of Vacuum Science & Technology A, 19(1), 118, 2001 |
| 3 |
Comparative study of a-C : H films for inertial confinement fusion prepared with various hydrocarbon precursors by radio frequency-plasma enhanced chemical vapor deposition Theobald M, Durand J, Baclet P, Legaie O Journal of Vacuum Science & Technology A, 18(1), 278, 2000 |