검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of Porogen Residue on Chemical, Optical, and Mechanical Properties of CVD SiCOH Low-k Materials Urbanowicz AM, Vanstreels K, Shamiryan D, De Gendt S, Baklanova MR Electrochemical and Solid State Letters, 12(8), H292, 2009 |