검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ultra-thin silicon oxide layers on crystalline silicon wafers: Comparison of advanced oxidation techniques with respect to chemically abrupt SiO2/Si interfaces with low defect densities Stegemann B, Gad KM, Balamou P, Sixtensson D, Vossing D, Kasemann M, Angermann H Applied Surface Science, 395, 78, 2017 |
| 2 |
Improved Si/SiOx interface passivation by ultra-thin tunneling oxide layers prepared by rapid thermal oxidation Gad KM, Vossing D, Balamou P, Hiller D, Stegemann B, Angermann H, Kasemann M Applied Surface Science, 353, 1269, 2015 |