검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching silicon-containing bilayer resists in ammonia-based plasmas Panda S, Wise R, Mahorowala A, Balasubramanium V, Sugiyama K Journal of Vacuum Science & Technology B, 23(3), 900, 2005 |
| No. | Article |
|---|---|
| 1 |
Etching silicon-containing bilayer resists in ammonia-based plasmas Panda S, Wise R, Mahorowala A, Balasubramanium V, Sugiyama K Journal of Vacuum Science & Technology B, 23(3), 900, 2005 |