검색결과 : 1건
No. | Article |
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1 |
Amorphous GexSi1-xOy sputtered thin films for integrated sensor applications Clement M, Iborra E, Sangrador J, Barberan I Journal of Vacuum Science & Technology B, 19(1), 294, 2001 |
No. | Article |
---|---|
1 |
Amorphous GexSi1-xOy sputtered thin films for integrated sensor applications Clement M, Iborra E, Sangrador J, Barberan I Journal of Vacuum Science & Technology B, 19(1), 294, 2001 |