화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Synthesis and Deposition of Silicon-Nitride Films by Laser Reactive Ablation of Silicon in Low-Pressure Ammonia - A Parametric Study
Mihailescu IN, Lita A, Teodorescu VS, Gyorgy E, Alexandrescu R, Luches A, Martino M, Barborica A
Journal of Vacuum Science & Technology A, 14(4), 1986, 1996
2 Selective Laser Oxidation of Thin Metal-Film as an Effect of Different Thermal Regimes
Barborica A, Chitica N, Dinescu M, Mihailescu IN, Ursu I
Thin Solid Films, 238(2), 276, 1994