검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Secondary-Ion Mass-Spectrometry Analysis of Ultrathin Impurity Layers in Semiconductors and Their Use in Quantification, Instrumental Assessment, and Fundamental Measurements Dowsett MG, Barlow RD, Allen PN Journal of Vacuum Science & Technology B, 12(1), 186, 1994 |