검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Quantitative Spectral Measurement of Air Leaks into Plasma Reactors Barna GG Journal of Vacuum Science & Technology A, 13(4), 2285, 1995 |
| 2 |
Sensor Integration into Plasma Etch Reactors of a Developmental Pilot Line Barna GG, Loewenstein LM, Brankner KJ, Butler SW, Mozumder PK, Stefani JA, Henck SA, Chapados P, Buck D, Maung S, Saxena S, Unruh A Journal of Vacuum Science & Technology B, 12(4), 2860, 1994 |