검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Studies of the low-pressure inductively-coupled plasma etching for a larger area wafer using plasma modeling and Langmuir probe Collison WZ, Ni TQ, Barnes MS Journal of Vacuum Science & Technology A, 16(1), 100, 1998 |
| No. | Article |
|---|---|
| 1 |
Studies of the low-pressure inductively-coupled plasma etching for a larger area wafer using plasma modeling and Langmuir probe Collison WZ, Ni TQ, Barnes MS Journal of Vacuum Science & Technology A, 16(1), 100, 1998 |