검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
AID of hafnium oxide thin film from tetrakis(ethylmethylamino)hafnium and ozone Liu XY, Ramanathan S, Longdergan A, Srivastava A, Lee E, Seidel TE, Barton JT, Pang D, Gordon RG Journal of the Electrochemical Society, 152(3), G213, 2005 |
| 2 |
ALD of hafnium oxide thin films from tetrakis(ethylmethylamino)hafnium and ozone (vol 152, pg G213, 2005) Liu XY, Ramanathan S, Longdergan A, Srivastava A, Lee E, Seidel TE, Barton JT, Pang D, Gordon RG Journal of the Electrochemical Society, 152(5), L9, 2005 |
| 3 |
Atmospheric pressure chemical vapor deposition of electrochromic tungsten oxide films Gordon RG, Barry S, Barton JT, Broomhall-Dillard RNR Thin Solid Films, 392(2), 231, 2001 |