검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Local line edge roughness in microphotonic devices: An electron-beam lithography study Ma YS, Cheng YC, Cerrina F, Barwicz T, Smith HI Journal of Vacuum Science & Technology B, 25(1), 235, 2007 |
| 2 |
Optimization of hydrogen silsesquioxane for photonic applications Holzwarth CW, Barwicz T, Smith HI Journal of Vacuum Science & Technology B, 25(6), 2658, 2007 |
| 3 |
Accurate resonant frequency spacing of microring filters without postfabrication trimming Holzwarth CW, Barwicz T, Popovic MA, Rakich PT, Ippen EP, Kartner FX, Smith HI Journal of Vacuum Science & Technology B, 24(6), 3244, 2006 |
| 4 |
Immersion zone-plate-array lithography Chao D, Patel A, Barwicz T, Smith HI, Menon R Journal of Vacuum Science & Technology B, 23(6), 2657, 2005 |
| 5 |
Evolution of line-edge roughness during fabrication of high-index-contrast microphotonic devices Barwicz T, Smith HI Journal of Vacuum Science & Technology B, 21(6), 2892, 2003 |