화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Ellipsometric investigation of nucleation sites for chemical vapor deposition of Si on SiO2 and Si3N4 surfaces
Basa C, Irene EA
Journal of Vacuum Science & Technology A, 17(3), 817, 1999
2 Atomic force microscopy and ellipsometry study of the nucleation and growth mechanism of polycrystalline silicon films on silicon dioxide
Basa C, Tinani M, Irene EA
Journal of Vacuum Science & Technology A, 16(4), 2466, 1998
3 Effects of ion pretreatments on the nucleation of silicon on silicon dioxide
Basa C, Hu YZ, Tinani M, Irene EA
Journal of Vacuum Science & Technology A, 16(6), 3223, 1998
4 In situ ellipsometry for monitoring nucleation and growth of silicon on silicon dioxide
Basa C, Hu YZ, Irene EA
Thin Solid Films, 313-314, 424, 1998
5 High Selectivity Magnetically Enhanced Reactive Ion Etching of Boron-Nitride Films
Cote D, Nguyen S, Dobuzinsky D, Basa C, Neureither B
Journal of the Electrochemical Society, 141(12), 3456, 1994
6 Boron-Nitride and Silicon Boron-Nitride Film and Polish Characterization
Neureither B, Basa C, Sandwick T, Blumenstock K
Journal of the Electrochemical Society, 140(12), 3607, 1993