검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of Ar and N-2 addition on CH4-H-2 based chemistry inductively coupled plasma etching of HgCdTe Boulard F, Baylet J, Cardinaud C Journal of Vacuum Science & Technology A, 27(4), 855, 2009 |
| No. | Article |
|---|---|
| 1 |
Effect of Ar and N-2 addition on CH4-H-2 based chemistry inductively coupled plasma etching of HgCdTe Boulard F, Baylet J, Cardinaud C Journal of Vacuum Science & Technology A, 27(4), 855, 2009 |