검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Spatially-Resolved Optical-Emission for Characterization of a Planar Radio-Frequency Inductively-Coupled Discharge Beale DF, Wendt AE, Mahoney LJ Journal of Vacuum Science & Technology A, 12(5), 2775, 1994 |
| No. | Article |
|---|---|
| 1 |
Spatially-Resolved Optical-Emission for Characterization of a Planar Radio-Frequency Inductively-Coupled Discharge Beale DF, Wendt AE, Mahoney LJ Journal of Vacuum Science & Technology A, 12(5), 2775, 1994 |