검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Plasma etch/deposition modeling: A new dynamically coupled multiscale code and comparison with experiment Bear MJ, Guillory JU Journal of Vacuum Science & Technology A, 18(5), 2045, 2000 |
| 2 |
Simulation of Pressure Effects in a Multipulsed Nitrogen Plasma Source Ion-Implantation System Bear MJ, Guillory JU Journal of Vacuum Science & Technology A, 15(4), 1963, 1997 |