검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography Schift H, Spreu C, Saidani M, Bednarzik M, Gobrecht J, Klukowska A, Reuther F, Gruetzner G, Solak HH Journal of Vacuum Science & Technology B, 27(6), 2846, 2009 |