검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Determination of Chemically Active Species in a Novel Microwave Plasma Source by Laser-Induced Fluorescence Brockhaus A, Yuan Y, Behle S, Engemann J Journal of Vacuum Science & Technology A, 14(3), 1882, 1996 |
| No. | Article |
|---|---|
| 1 |
Determination of Chemically Active Species in a Novel Microwave Plasma Source by Laser-Induced Fluorescence Brockhaus A, Yuan Y, Behle S, Engemann J Journal of Vacuum Science & Technology A, 14(3), 1882, 1996 |