검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode Herden M, Bauer AJ, Beichele M, Ryssel H Solid-State Electronics, 45(8), 1251, 2001 |
| 2 |
Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure in different gas atmospheres Beichele M, Bauer AJ, Herden M, Ryssel H Solid-State Electronics, 45(8), 1383, 2001 |