검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Texture and surface morphology improvement of Al by two-stage chemical vapor deposition and its integration in an Al plug-interconnect scheme for sub 0.25 mu m metallization Naik M, Guo T, Chen L, Mosely R, Beinglass I Journal of Vacuum Science & Technology A, 16(3), 1233, 1998 |
| 2 |
CVD Al PVD Al integration for advanced via and interconnect technology Beinglass I, Naik M Thin Solid Films, 320(1), 35, 1998 |