검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer Ganji BA, Sedaghat SB, Roncaglia A, Belsito L Solid-State Electronics, 148, 27, 2018 |
| 2 |
Phonon scattering enhancement in silicon nanolayers Narducci D, Cerofolini G, Ferri M, Suriano F, Mancarella F, Belsito L, Solmi S, Roncaglia A Journal of Materials Science, 48(7), 2779, 2013 |