화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Study of silicon strain in shallow trench isolation
Belyansky M, Klymko N, Conti R, Chidambarrao D, Liu F
Journal of Vacuum Science & Technology A, 28(4), 829, 2010
2 Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stress
Belyansky M, Chace M, Gluschenkov O, Kempisty J, Klymko N, Madan A, Mallikarjunan A, Molis S, Ronsheim P, Wang Y, Yang D, Li Y
Journal of Vacuum Science & Technology A, 26(3), 517, 2008
3 Structure of heteroepitaxial thin films of hafnium diboride grown on a Hf(0001) surface as determined by scanning tunneling microscopy
Belyansky M, Trenary M
Journal of Physical Chemistry B, 104(50), 11833, 2000
4 Reflection Adsorption Infrared-Spectroscopy of the Oxidation of Thin-Films of Boron and Hafnium Diboride Grown on HF(0001)
Belyansky M, Trenary M
Journal of Vacuum Science & Technology A, 15(6), 3065, 1997
5 Formation of Hydrogen-Bonded Aggregates of Aminomethylidyne on Pt(111)
Jentz D, Mills P, Celio H, Belyansky M, Trenary M
Journal of Chemical Physics, 105(8), 3250, 1996