검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Time-resolved measurements of the E-to-H mode transition in electronegative pulse-modulated inductively coupled plasmas Edamura M, Benck EC, Wang YC Journal of Vacuum Science & Technology A, 24(6), 2151, 2006 |
| 2 |
Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas Edamura M, Benck EC Journal of Vacuum Science & Technology A, 22(2), 293, 2004 |
| 3 |
Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas Edamura M, Benck EC Journal of Vacuum Science & Technology A, 21(2), 470, 2003 |
| 4 |
Submillimeter-wavelength plasma chemical diagnostics for semiconductor manufacturing Benck EC, Golubiatnikov GY, Fraser GT, Ji B, Motika SA, Karwacki EJ Journal of Vacuum Science & Technology B, 21(5), 2067, 2003 |
| 5 |
Investigations in the sheath region of a radio frequency biased inductively coupled discharge Benck EC, Schwabedissen A, Gates A, Roberts JR Journal of Vacuum Science & Technology A, 16(1), 306, 1998 |