검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comparison of a new photoresist (DiaPlate 133) with SU-8 using both x-ray and ion beam lithographies Gonin Y, Munnik F, Benninger F, Dias F, Mikhailov S Journal of Vacuum Science & Technology B, 22(4), 1982, 2004 |
| 2 |
Creating sub-surface channels in PMMA with ion beam lithography in only one step Gonin Y, Munnik F, Benninger F, Mikhailov S Applied Surface Science, 217(1-4), 289, 2003 |