검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Lithography for now and the future van de Kerkhof MA, Benschop JPH, Banine VY Solid-State Electronics, 155, 20, 2019 |
| 2 |
Reticle's contribution to critical dimension control and overlay in extreme-ultraviolet lithography Meiling H, Benschop JPH, Loopstra E, van der Werf JE, Leenders MHA Journal of Vacuum Science & Technology B, 18(6), 2921, 2000 |
| 3 |
EUCLIDES: European EUVL program Benschop JPH, van Dijsseldonk AJJ, Kaiser WM, Ockwell DC Journal of Vacuum Science & Technology B, 17(6), 2978, 1999 |