화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Diffusion formation of nickel suicide contacts in SiNWs
Beregovsky M, Katsman A, Hajaj EM, Yaish YE
Solid-State Electronics, 80, 110, 2013
2 Protection of silicon wafers from alkali contamination during high-temperature processing using electric field
Beregovsky M, Klyuch A, Raskin Y, Zinman Y, Shacham-Diamand Y, Deal BE
Journal of the Electrochemical Society, 147(10), 3892, 2000
3 Effect of impurities on initial stages of phase formation for the system of Ti deposited on (001) Si-Ge layers
Beregovsky M, Levin I, Berner A, Eizenberg M, Demuth V, Strunk HP
Thin Solid Films, 338(1-2), 110, 1999