검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Automated emissivity corrected wafer-temperature measurement in Aixtrons planetary reactors Bergunde T, Henninger B, Lunenburger M, Heuken M, Weyers M, Zettler JT Journal of Crystal Growth, 248, 235, 2003 |
| 2 |
Modeling and experimental verification of transport and deposition behavior during MOVPE of Ga1-xInxP in the Planetary Reactor Dauelsberg M, Kadinski L, Makarov YN, Bergunde T, Strauch G, Weyers M Journal of Crystal Growth, 208(1-4), 85, 2000 |
| 3 |
Carbon doping for the GaAs base layer of Heterojunction Bipolar Transistors in a production scale MOVPE reactor Brunner F, Bergunde T, Richter E, Kurpas P, Achouche M, Maassdorf A, Wurfl J, Weyers M Journal of Crystal Growth, 221, 53, 2000 |