검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition process of Si-B-C ceramics from CH3SiCl3/BCl3/H-2 precursor Berionneau J, Chollon G, Langlais F Thin Solid Films, 516(10), 2848, 2008 |
| No. | Article |
|---|---|
| 1 |
Deposition process of Si-B-C ceramics from CH3SiCl3/BCl3/H-2 precursor Berionneau J, Chollon G, Langlais F Thin Solid Films, 516(10), 2848, 2008 |