검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Novel methodology for postexposure bake calibration and optimization based on electrical linewidth measurement and process metamodeling Capodieci L, Subramanian R, Rangarajan B, Heavlin WD, Li JW, Bernard DA, Boksha VV Journal of Vacuum Science & Technology B, 16(6), 3752, 1998 |