검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Cu Metallization Using a Permanent-Magnet Electron-Cyclotron-Resonance Microwave Plasma/Sputtering Hybrid System Gorbatkin SM, Poker DB, Rhoades RL, Doughty C, Berry LA, Rossnagel SM Journal of Vacuum Science & Technology B, 14(3), 1853, 1996 |
| 2 |
Permanent-Magnet Electron-Cyclotron-Resonance Plasma Source with Remote Window Berry LA, Gorbatkin SM Journal of Vacuum Science & Technology A, 13(2), 343, 1995 |
| 3 |
Ion and Neutral Argon Temperatures in Electron-Cyclotron-Resonance Plasmas by Doppler-Broadened Emission-Spectroscopy Tsu DV, Young RT, Ovshinsky SR, Klepper CC, Berry LA Journal of Vacuum Science & Technology A, 13(3), 935, 1995 |
| 4 |
Cu Deposition Using a Permanent-Magnet Electron-Cyclotron-Resonance Microwave Plasma Source Berry LA, Gorbatkin SM, Rhoades RL Thin Solid Films, 253(1-2), 382, 1994 |